| US 7,542,872 B2 | ||
| Form measuring instrument, form measuring method and form measuring program | ||
| Soichi Kadowaki, Kawasaki (Japan); Tsukasa Kojima, Sapporo (Japan); and Tomonori Goto, Sapporo (Japan) | ||
| Assigned to Mitutoyo Corporation, Kawasaki-shi (Japan) | ||
| Filed on Feb. 02, 2007, as Appl. No. 11/701,438. | ||
| Claims priority of application No. 2006-034231 (JP), filed on Feb. 10, 2006. | ||
| Prior Publication US 2007/0198212 A1, Aug. 23, 2007 | ||
| Int. Cl. G06F 9/45 (2006.01) | ||
| U.S. Cl. 702—168 [702/152; 702/153; 33/503; 33/559; 73/105; 73/601; 73/614] | 19 Claims |
| 1. A form measuring instrument for measuring a form of a surface of an object to be measured using a contact to follow the
surface, the instrument comprising:
a pseudo-measurement point acquirer operative to acquire positional coordinates of the reference point of the contact as pseudo-measurement
points when the contact touches the object at a plurality of locations;
a normal vector generator operative to estimate a surface or line along the pseudo-measurement points from the pseudo-measurement
points to calculate normal vectors extending from the pseudo-measurement points to the surface or line;
a contact model locator operative to locate contact models which are located in a pseudo space generated by computing and
that specify the surface form of the contact so as to coincide the pseudo-measurement points with reference points of the
contact models and so as to coincide attitudes of the contact on measurement with attitudes of the contact models; and
a measurement point calculator operative to calculate cross points as measurement points, at which the normal vectors cross
the surfaces of the located contact models.
|