| US 7,542,820 B2 | ||
| Methods and arrangement for creating recipes using best-known methods | ||
| Chung-Ho Huang, San Jose, Calif. (US); Shih-Jeun Fan, San Jose, Calif. (US); Chin Chuan Chang, Los Altos, Calif. (US); and Nicolas Bright, San Jose, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Sep. 28, 2006, as Appl. No. 11/536,582. | ||
| Prior Publication US 2008/0188970 A1, Aug. 07, 2008 | ||
| Int. Cl. G06F 19/00 (2006.01) | ||
| U.S. Cl. 700—104 | 29 Claims |
| 1. A method for facilitating creation of at least a recipe for processing at least a substrate in at least a processing system,
the method comprising:
providing a recipe editor, said recipe editor incorporating best-known methods (BKMs), said BKMs being practice specifications
for said recipe;
creating a plurality of BKM modules based on said BKMs for said recipe, wherein each BKM module of said plurality of BKM modules
relates to a process stage for processing said substrate and includes a plurality of recipe steps of said recipe;
defining rules for parameters in said plurality of BKM modules;
translating, using said recipe editor, user-propagated parameter values into updated rules; said user-propagated parameter
values being propagated by a first user in at least one of said processing system and said plurality of BKM modules;
generating at least an updated BKM module using said updated rules; and
providing said updated BKM module to at least a second processing system that is used by a second user.
|