| US 7,542,140 B2 | ||
| Detection method using electromagnetic wave and detection apparatus | ||
| Toshihiko Ouchi, Sagamihara (Japan); Shintaro Kasai, Tokyo (Japan); Haruko Yoneyama, Saitama (Japan); and Masatsugu Yamashita, Sendai (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan); and Riken, Saitama-Ken (Japan) | ||
| Filed on Nov. 30, 2007, as Appl. No. 11/948,466. | ||
| Claims priority of application No. 2006-327801 (JP), filed on Dec. 05, 2006. | ||
| Prior Publication US 2008/0137068 A1, Jun. 12, 2008 | ||
| Int. Cl. G01B 11/00 (2006.01) | ||
| U.S. Cl. 356—394 [356/388; 356/316] | 12 Claims |
| 1. A method of detecting a state change of a substance using an electromagnetic wave selected from a frequency range of 0.1
THz to 10 THz, comprising:
a first step of placing a substance on a sample holding section;
a second step of irradiating the substance with the electromagnetic wave;
a third step of detecting an electromagnetic wave that has passed through or been reflected from the substance;
a fourth step of determining a frequency dependence of a property of the substance with respect to the irradiating electromagnetic
wave from information about the detected electromagnetic wave and the irradiating electromagnetic wave and then calculating
a slope of a straight line or a slope of a straight line obtained by straight-line approximation of the frequency dependence
of the property of the substance; and
a fifth step of evaluating a degree of state change from a standard state of the substance by comparing a previously-obtained
slope of a straight line of the frequency dependence of the property of the substance in the standard state and the slope
of the straight line of the substance calculated in the fourth step.
|