| US 7,541,801 B2 | ||
| Probe card transfer assist apparatus, and inspection equipment and method using same | ||
| Munetoshi Nagasaka, Nirasaki (Japan); and Chiaki Mochizuki, Nirasaki (Japan) | ||
| Assigned to Tokyo Electron Limited, Tokyo (Japan) | ||
| Filed on Sep. 20, 2006, as Appl. No. 11/523,710. | ||
| Claims priority of application No. 2005-273195 (JP), filed on Sep. 21, 2005. | ||
| Prior Publication US 2007/0063720 A1, Mar. 22, 2007 | ||
| Int. Cl. G01R 31/02 (2006.01) | ||
| U.S. Cl. 324—158.1 | 23 Claims |
| 1. A probe card transfer assist apparatus for assisting an operation of transferring a probe card used in an electrical inspection
apparatus, the apparatus comprising:
a holder for holding the probe card;
a support for supporting the holder in a freely-rotatable manner about a point; and
an elevation unit for moving the support up and down,
wherein the holder includes a coupling member configured to connect the holder with a center of the probe card via rotation
of the coupling member;
a maneuvering handle for manipulating the coupling member; and a holding position detecting sensor for detecting a position
of the maneuvering handle to determine whether the maneuvering handle is at a probe card support-position.
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