| US 7,541,719 B2 | ||
| Stage and X-Y stage each on which to place sample, and charged-particle beam apparatus | ||
| Masashi Fujita, Hitachinaka (Japan); and Shuichi Nakagawa, Hitachinaka (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on May 29, 2007, as Appl. No. 11/754,482. | ||
| Claims priority of application No. 2006-148924 (JP), filed on May 29, 2006. | ||
| Prior Publication US 2007/0295140 A1, Dec. 27, 2007 | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—328 | 9 Claims |
| 1. A stage on which to place a sample, including a base having a guiding unit, a table which moves in a movement direction
along the guiding unit, a motion unit which provides motion in the movement direction in order to cause the table to move,
and a transmission unit for transmitting the motion to the table,
wherein the transmission unit comprises:
a table block fixed to the table; and
a motion block fixed to the motion unit, and
wherein the table block and the motion block contact each other at two points forward and backward in the movement direction
while in motion, and are separated away from each other while not in motion.
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