| US 7,541,595 B2 | ||
| Electromagnetic radiation detecting apparatus, radiation detecting apparatus, radiation detecting system and laser processing method | ||
| Tomoyuki Yagi, Honjo (Japan); Tadao Endo, Honjo (Japan); Toshio Kameshima, Kumagaya (Japan); Katsuro Takenaka, Katsuro-Gun (Japan); and Keigo Yokoyama, Honjo (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Jun. 09, 2006, as Appl. No. 11/449,621. | ||
| Claims priority of application No. 2005-172466 (JP), filed on Jun. 13, 2005; and application No. 2006-151865 (JP), filed on May 31, 2006. | ||
| Prior Publication US 2006/0289769 A1, Dec. 28, 2006 | ||
| Int. Cl. G01T 1/20 (2006.01) | ||
| U.S. Cl. 250—370.11 [250/362; 356/620; 438/4; 438/132] | 18 Claims |
| 1. An electromagnetic radiation detecting apparatus comprising:
an insulating substrate;
a switching element disposed over said insulating substrate;
a photoelectric conversion element disposed over said switching element;
an insulating layer disposed between said switching element and said photoelectric conversion element; and
a shaped member aligned with respect to said switching element to mark a position of a portion of said switching element,
wherein said shaped member is disposed over a part of said photoelectric conversion element, and said part includes an area
aligned with said switching element.
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