US 7,541,212 B2
Image sensor including an anti-reflection pattern and method of manufacturing the same
Tae-Seok Oh, Seoul (Korea, Republic of)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (Korea, Republic of)
Filed on Mar. 16, 2006, as Appl. No. 11/377,485.
Claims priority of application No. 10-2005-0026274 (KR), filed on Mar. 30, 2005.
Prior Publication US 2006/0220025 A1, Oct. 05, 2006
Int. Cl. H01L 23/58 (2006.01); H01L 29/04 (2006.01)
U.S. Cl. 438—48  [438/70] 9 Claims
OG exemplary drawing
 
1. A method of manufacturing an image sensor, comprising:
providing a substrate including a first area and a second area, wherein a photodiode is formed in the first area of the substrate and the second area surrounds the first area;
forming an insulation pattern structure making contact with the photodiode in the first area of the substrate;
forming an anti-reflection layer on the insulation pattern structure and on the substrate;
forming a preliminary insulation interlayer structure having a plurality of insulation layers on the anti-reflection layer and on the substrate, the preliminary insulation interlayer structure including a first metal wiring structure in the first area and a second metal wiring structure in the second area, wherein a top surface of the second metal wiring structure in the second area is above that of the first metal wiring structure in the first area;
forming a recess portion in the first area of the substrate by partially etching the preliminary insulation interlayer structure, to form a first preliminary insulation interlayer structure on the first area of the substrate and form a second preliminary insulation interlayer structure on the second area of the substrate;
partially etching the first preliminary insulation interlayer structure and the anti-reflection layer corresponding to the photodiode, to form a first insulation interlayer structure having a second opening and form an anti-reflection pattern having a first opening connected to the second opening;
forming a transparent insulation pattern in the first and second openings;
forming a color filter on the transparent insulation pattern; and
forming a micro lens on the color filter.