US 7,540,923 B2
Shower head structure for processing semiconductor
Toshio Takagi, Nirasaki (Japan); Takeshi Sakuma, Minato-ku (Japan); Yuji Kato, Ebina (Japan); and Kenji Matsumoto, Nirasaki (Japan)
Assigned to Tokyo Electron Limited, Tokyo (Japan)
Appl. No. 10/505,169
PCT Filed Feb. 28, 2003, PCT No. PCT/JP03/02327
§ 371(c)(1), (2), (4) Date Aug. 30, 2004,
PCT Pub. No. WO03/073490, PCT Pub. Date Sep. 04, 2003.
Claims priority of application No. 2002-054541 (JP), filed on Feb. 28, 2002; application No. 2002-177192 (JP), filed on Jun. 18, 2002; and application No. 2002-365813 (JP), filed on Dec. 17, 2002.
Prior Publication US 2005/0118737 A1, Jun. 02, 2005
Int. Cl. C23C 16/52 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/18 (2006.01)
U.S. Cl. 118—666  [116/667; 156/345.24] 11 Claims
OG exemplary drawing
 
1. A semiconductor processing device for processing a semiconductor while providing a first gas and a second gas into a processing space accommodating a heated substrate to be processed, comprising:
a processing chamber forming the processing space and capable of being pumped in vacuum;
a susceptor for mounting the substrate in the processing chamber;
a heater for heating the substrate on the susceptor;
a shower head including a plurality of gas injection holes and a first head space and a second head space formed therein, the shower head being installed at a ceiling of the processing chamber, wherein the first head space is separated from the second head space, and the gas injection holes include first gas injection holes and second gas injection holes to which the first and the second gas are respectively introduced through the first and the second head space;
a heat ray introducing passage formed through the shower head and separated from the first and the second head space formed inside the shower head;
a radiation thermometer facing through a measurement window at an upper opening part of the heat ray introducing passage; and
a gas introducing passage formed inside the shower head and connected to the heat ray introducing passage to introduce an additional gas thereinto, the gas introducing passage being separated from the first and the second head space formed inside the shower head and the additional gas being introduced into the processing space through the heat ray introducing passage,
wherein the additional gas, the first gas, and the second gas are different from each other.