| US 7,378,859 B2 | ||
| System and method for estimation of integrated circuit signal characteristics using optical measurements | ||
| Franco Stellari, Ho Ho Kus, N.J. (US); Alberto Tosi, Invorio (Italy); and Peilin Song, Lagrangeville, N.Y. (US) | ||
| Assigned to International Business Machines Corporation, Armonk, N.Y. (US) | ||
| Filed on Feb. 02, 2005, as Appl. No. 11/49,324. | ||
| Prior Publication US 2006/0168793 A1, Aug. 03, 2006 | ||
| Int. Cl. G01R 31/00 (2006.01) | ||
| U.S. Cl. 324—752 [324/765] | 10 Claims |
| 1. A method for making electrical measurements using optical emissions, comprising:
positioning a sensor/photodetector to measure radiation emissions from device to be tested;
collecting radiation emission information from the device to be tested during electrical operation;
determining characteristic features of the radiation emission information for n-FET and p-FET emissions of the device under
test;
determining differences between the characteristic features; and
comparing the differences to a model to determine a measurement.
|