| US 7,539,969 B2 | ||
| Computer readable mask shrink control processor | ||
| S. M. Reza Sadjadi, Saratoga, Calif. (US); and Nicolas Bright, San Jose, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on May 10, 2005, as Appl. No. 11/126,708. | ||
| Prior Publication US 2006/0259886 A1, Nov. 16, 2006 | ||
| Int. Cl. G06F 17/50 (2006.01) | ||
| U.S. Cl. 716—19 [716/11] | 5 Claims |
| 1. An apparatus comprising computer readable media comprising:
computer readable code for receiving a feature layout;
computer readable code for applying shrink correction on the feature layout, wherein the computer readable code for applying
the shrink correction on the feature layout, comprises:
computer readable code for reducing dimensions of patterned layer lines of the patterned layer;
computer readable code for providing corner cutouts for forming features in a patterned layer;
computer readable code for generating a plurality of reticle layouts from the feature layout; and
computer readable code for applying shrink correction to the plurality of reticle layouts;
computer readable code for comparing a resulting test wafer with the feature layout and generating shrink correction rules
based on the comparing; and
comprising computer readable code for applying the generated shrink correction rules to the feature layout.
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