| US 7,539,552 B2 | ||
| Method and apparatus for implementing a universal coordinate system for metrology data | ||
| Michael G. McIntyre, Austin, Tex. (US); Zhuqing Zong, Round Rock, Tex. (US); Andrew Drozda-Freeman, Austin, Tex. (US); and Vijay Sankaran, Austin, Tex. (US) | ||
| Assigned to Advanced Micro Devices, Inc., Austin, Tex. (US) | ||
| Filed on Oct. 09, 2006, as Appl. No. 11/539,788. | ||
| Prior Publication US 2008/0147222 A1, Jun. 19, 2008 | ||
| Int. Cl. G06F 19/00 (2006.01); G06F 17/50 (2006.01); G01R 31/26 (2006.01) | ||
| U.S. Cl. 700—108 [716/4; 438/14; 702/150] | 22 Claims |
| 1. A method, comprising:
receiving a metrology report including metrology data collected by a metrology tool, position data associated with the metrology
data, and context data associated with the metrology tool and identifying a type of metrology process employed by the metrology
tool;
determining a first coordinate system employed by the metrology tool based on the context data by accessing a database storing
a plurality of coordinate systems indexed by the type of metrology process;
transforming the position data from the first coordinate system to a second coordinate system to generate transformed position
data; and
storing the transformed position data and the metrology data in a data store and associating the transformed position data
with the metrology data.
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