| US 7,539,350 B2 | ||
| Image correction method | ||
| Junji Oaki, Kanagawa (Japan); Shinji Sugihara, Tokyo (Japan); and Yuichi Nakatani, Kanagawa (Japan) | ||
| Assigned to Advanced Mask Inspection Technology Inc., Yokohama-shi (Japan) | ||
| Filed on Feb. 24, 2006, as Appl. No. 11/360,584. | ||
| Claims priority of application No. 2005-085214 (JP), filed on Mar. 24, 2005. | ||
| Prior Publication US 2006/0215900 A1, Sep. 28, 2006 | ||
| Int. Cl. G06K 9/40 (2006.01) | ||
| U.S. Cl. 382—254 | 7 Claims |
| 1. An image correction method for generating an estimation model image from an inspection reference pattern image and a pattern
image under test, said method comprising:
setting reference points at a plurality of separated positions of the inspection reference pattern image, giving weights to
the inspection reference pattern image with reference to the reference points, and generating decomposed images the number
of which is equal to the number of reference points;
generating simultaneous equations which describe an input-output relationship using a linear prediction model using, as an
output, respective pixels of the pattern image under test and using, as an input, a linear coupling of a pixel group around
pixel corresponding to each pixel of the decomposed images the number of which is equal to the number of reference points;
solving the simultaneous equations to estimate parameters of the prediction model; and
generating an estimation model image by using the estimated parameters.
|