| US 7,539,328 B2 | ||
| Surface position measuring method and apparatus | ||
| Takenobu Kobayashi, Utsunomiya (Japan); and Yuji Kosugi, Utsunomiya (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Feb. 13, 2004, as Appl. No. 10/777,192. | ||
| Claims priority of application No. 2003-035170 (JP), filed on Feb. 13, 2003. | ||
| Prior Publication US 2005/0169515 A1, Aug. 04, 2005 | ||
| Int. Cl. G06K 9/00 (2006.01); G01C 1/00 (2006.01); G01B 11/00 (2006.01) | ||
| U.S. Cl. 382—106 [382/145; 356/152.2; 356/398] | 5 Claims |
| 1. A measuring apparatus for measuring a position of a surface of an object while the object is scanned in a scanning direction
in an X-Y plane, said apparatus comprising:
a detecting unit configured to detect the position of the surface of the object in a Z direction perpendicular to the X-Y
plane;
a stage configured to scan the object relative to said detecting unit in the scanning direction; and
a controller configured to cause said stage to scan the object relative to said detecting unit in two scanning directions,
in the X-Y plane, opposite to each other, to detect, using said detecting unit, with respect to each of the two scanning directions,
a position of the surface in the Z direction for the same detection point on the surface, to calculate a correction value
for correcting a position of the surface to be detected by said detecting unit while the object is scanned relative to said
detecting unit in one of the two scanning directions, based on the positions of the surface detected for the same detection
point with respect to the two scanning directions, and to correct the position of the surface detected by said detecting unit
while the object is scanned relative to said detecting unit in the one of the two scanning directions, with the calculated
correction value.
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