| US 7,538,928 B1 | ||
| MEMS mirror with parallel springs and arched support for beams | ||
| Yee-Chung Fu, Fremont, Calif. (US) | ||
| Assigned to Advanced NuMicro Systems, Inc., San Jose, Calif. (US) | ||
| Filed on Apr. 02, 2007, as Appl. No. 11/695,595. | ||
| Application 11/695595 is a continuation in part of application No. 11/263795, filed on Oct. 31, 2005, granted, now 7,301,689. | ||
| Int. Cl. G02B 26/08 (2006.01); G02B 26/00 (2006.01) | ||
| U.S. Cl. 359—225 [359/290] | 14 Claims |
| 1. A micro-electro-mechanical system (MEMS) mirror device, comprising:
a mirror;
a plurality of spring elements coupled to one half of the mirror;
a beam structure having (1) a proximal end coupled by the plurality of spring elements to said one half of the mirror and
(2) a distal end extending away from said one half of the mirror;
a spring coupled to the beam structure;
a stationary pad coupled by the spring to the beam structure;
wherein the plurality of spring elements and the spring have rotational axes aligned to a rotational axis of the mirror;
wherein the plurality of spring elements comprises:
a straight section, wherein a first end of the straight section is coupled to the beam structure; and
a plurality of spring sections, wherein first ends of the spring sections are coupled to a second end of the straight section,
and second ends of the spring sections are coupled to said one half of the mirror.
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