| US 7,538,873 B2 | ||
| Method for simulating the movement of particles | ||
| Christoph Zechner, Zurich (Switzerland) | ||
| Assigned to Synopsys Switzerland LLC, Zurich (Switzerland) | ||
| Filed on Nov. 13, 2006, as Appl. No. 11/559,333. | ||
| Application 11/559333 is a continuation of application No. 10/697982, filed on Oct. 31, 2003, granted, now 7,142,297. | ||
| Prior Publication US 2007/0087552 A1, Apr. 19, 2007 | ||
| Int. Cl. G06F 7/60 (2006.01); H01L 29/76 (2006.01); H01L 21/66 (2006.01); G01N 15/02 (2006.01) | ||
| U.S. Cl. 356—335 [703/2; 703/4; 438/17; 257/66; 257/E21.133] | 24 Claims |

| 1. A method for determining the movement of particles of a particular type in a medium that includes a first region having
a first phase of the medium, a second region having a second phase of the medium, and an interface region between first and
second regions and in which at a particular point in time the medium transitions spatially from the first phase to the second
phase, for use with a computer system, comprising the steps of:
the computer system determining the phase distribution gradient across the interface region; and
the computer system determining the movement of the particles in dependence upon the phase distribution gradient.
|