| US 7,538,636 B2 | ||
| Electronic part with a comb electrode and protective film and electronic equipment including same | ||
| Ryouichi Takayama, Hirakata (Japan); Hidekazu Nakanishi, Neyagawa (Japan); Takashi Inoue, Suita (Japan); Tetsuo Kawasaki, Katano (Japan); Kouji Hasegawa, Muroran (Japan); and Yukio Iwasaki, Tadaoka-cho (Japan) | ||
| Assigned to Panasonic Corporation, Osaka (Japan) | ||
| Appl. No. 10/540,399 PCT Filed Dec. 24, 2003, PCT No. PCT/JP03/16513 § 371(c)(1), (2), (4) Date Feb. 22, 2006, PCT Pub. No. WO2004/059837, PCT Pub. Date Jul. 15, 2004. |
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| Claims priority of application No. 2002-374396 (JP), filed on Dec. 25, 2002; application No. 2002-374397 (JP), filed on Dec. 25, 2002; application No. 2002-374398 (JP), filed on Dec. 25, 2002; and application No. 2002-374402 (JP), filed on Dec. 25, 2002. | ||
| Prior Publication US 2006/0158800 A1, Jul. 20, 2006 | ||
| Int. Cl. H03H 9/13 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01) | ||
| U.S. Cl. 333—193 [310/313 A; 310/313 B] | 8 Claims |
| 1. An electronic part which includes a substrate, a comb-type electrode that is disposed on an upper surface of the substrate,
and a protective film that covers the comb-type electrode and has an uneven shape at a top surface thereof,
wherein a height from the surface of the substrate which is in contact with the protective film to a top part of a convex
portion of the protective film is t, a height from the surface of the substrate which is in contact with the protective film
to a bottom part of a concave portion of the protective film is t1, a height (t-t1) from the top part of the convex portion of the protective film to the bottom part of the concave portion of the protective
film is t2, a pitch width of one pitch in the uneven shape of the protective film is L, a width of one pitch of the convex portion of
an unevenness in the uneven shape of the protective film is L1, a width of one pitch of the concave portion is L2, a pitch width of one pitch of the comb-type electrode is p, a width of one of electrode fingers which form the comb-type
electrode is p1, a width between the electrode fingers is p2, and a film thickness of the comb-type electrode is h so as to satisfy t2≤h,
and wherein correlations of L≈p, p1+p2=p, L1+L2=L, L1<p1 and L2>p2 are satisfied).
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