US 7,538,333 B1
Contactless charge measurement of product wafers and control of corona generation and deposition
Amin Samsavar, Saratoga, Calif. (US); John M. Schmidt, Oakland, Calif. (US); Rainer Schierle, Los Altos, Calif. (US); Gregory S. Horner, Santa Clara, Calif. (US); Thomas G. Miller, Sunnyvale, Calif. (US); Zhiwei Xu, Sunnyvale, Calif. (US); Xiaofeng Hu, Richardson, Tex. (US); Jianou Shi, Milpitas, Calif. (US); and Sergio Edelstein, Los Gatos, Calif. (US)
Assigned to KLA-Tencor Technologies Corporation, Milpitas, Calif. (US)
Filed on Jul. 27, 2006, as Appl. No. 11/460,517.
Application 11/460517 is a division of application No. 10/701112, filed on Nov. 04, 2003, granted, now 7,248,062.
Claims priority of provisional application 60/423639, filed on Nov. 04, 2002.
Int. Cl. H01J 37/30 (2006.01); H01J 37/317 (2006.01); G01R 31/26 (2006.01)
U.S. Cl. 250—492.21  [250/492.22; 250/492.2; 250/492.3; 250/492.1; 324/501] 18 Claims
OG exemplary drawing
 
1. A system, comprising:
a corona source configured to deposit a charge onto a specimen; and
an environmental control unit configured to alter a property of the environment within the corona source; and a gas flow device coupled to the corona source, wherein the gas flow device is configured to alter a flow of one or more gases within the corona source.