| US 7,538,042 B2 | ||
| Method of manufacturing a structure having a projection | ||
| Aya Imada, Kanagawa (Japan); and Tohru Den, Tokyo (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Mar. 02, 2005, as Appl. No. 11/68,765. | ||
| Application 11/068765 is a division of application No. 10/396397, filed on Mar. 26, 2003, granted, now 6,878,634. | ||
| Claims priority of application No. 2002-107580 (JP), filed on Apr. 10, 2002. | ||
| Prior Publication US 2005/0167852 A1, Aug. 04, 2005 | ||
| Int. Cl. H01L 21/44 (2006.01) | ||
| U.S. Cl. 438—746 [438/700; 257/E49.001] | 4 Claims |
| 1. A method of manufacturing a structure, comprising the steps of:
preparing a first substrate having a projection;
forming a metal layer on the projection;
transferring the metal layer with a projection pattern to a second substrate having a resin;
etching a part of the second substrate to form a projection therein by using the metal layer as a mask;
removing the metal layer and the resin from the second substrate; and
anodizing the second substrate to form pores.
|