| US 7,538,041 B2 | ||
| Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium | ||
| Mitsuru Takai, Tokyo (Japan); Kazuhiro Hattori, Tokyo (Japan); Takahiro Suwa, Tokyo (Japan); and Shuichi Okawa, Tokyo (Japan) | ||
| Assigned to TDK Corporation, Tokyo (Japan) | ||
| Filed on Aug. 19, 2005, as Appl. No. 11/206,874. | ||
| Claims priority of application No. 2004-275682 (JP), filed on Sep. 22, 2004. | ||
| Prior Publication US 2006/0063042 A1, Mar. 23, 2006 | ||
| Int. Cl. H01L 21/302 (2006.01) | ||
| U.S. Cl. 438—720 [438/3; 438/714; 438/738] | 2 Claims |
| 1. A method of manufacturing a magnetic recording medium, the method comprising the steps of:
forming a magnetic recording layer in a predetermined concavo-convex pattern on a substrate;
forming a first non-magnetic layer on the concavo-convex pattern;
forming an etching monitoring layer on the first non-magnetic layer;
forming a second non-magnetic layer on the etching monitoring layer; and
etching at least the second non-magnetic layer formed on the magnetic recording layer forming a convex portion of the concavo-convex
pattern,
wherein a concave portion of the concavo-convex pattern is filled with at least one kind or more of the non-magnetic layer
formed in each step after the first non-magnetic layer forming step, the etching monitoring layer forming step, and the second
non-magnetic layer forming step are carried out, and
wherein the etching step is a step of substantially flattening a surface on the convex portion and the concave portion, and
includes a step of adjusting to zero or decreasing an etching speed of the etching monitoring layer, an etching speed of the
first non-magnetic layer, or an etching speed of the second non-magnetic layer when the second non-magnetic layer remains
on the concave portion of the concavo-convex pattern after the etching monitoring layer provided on the magnetic recording
layer forming the convex portion starts to be etched, and
the first non-magnetic layer and the second non-magnetic layer are formed of a same material.
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