US 7,537,950 B2
Nitride-based light emitting heterostructure
Remigijus Gaska, Columbia, S.C. (US); Jianping Zhang, Lexington, S.C. (US); and Michael Shur, Latham, N.Y. (US)
Assigned to Sensor Electronic Technology, Inc., Columbia, S.C. (US)
Filed on Dec. 06, 2007, as Appl. No. 11/951,607.
Application 11/951607 is a division of application No. 11/292519, filed on Dec. 02, 2005, granted, now 7,326,963.
Claims priority of provisional application 60/633828, filed on Dec. 06, 2004.
Prior Publication US 2008/0081390 A1, Apr. 03, 2008
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 438—47  [438/46; 438/37] 19 Claims
OG exemplary drawing
 
1. A method of generating a nitride-based light emitting heterostructure, the method comprising:
forming a light generating structure, the forming a light generating structure including:
forming a set of barrier layers, each barrier layer comprising a graded composition causing electrons to lose energy prior to entering a quantum well; and
forming a set of quantum wells, each quantum well adjoined by a barrier layer,
wherein the forming a set of quantum wells includes selecting a thickness for each quantum well that is less than a characteristic radius of a defect responsible for nonradiative recombination.