US 7,537,114 B2
	System and method for storing and transporting photomasks in fluid
Emily F. Gallagher, Burlington, Vt. (US); and Louis M. Kindt, Milton, Vt. (US)
Assigned to International Business Machines Corporation, Armonk, N.Y. (US)
Filed on Jan. 25, 2006, as Appl. No. 11/275,694.
Prior Publication US 2007/0172743 A1, Jul. 26, 2007
Int. Cl. B65D 85/38 (2006.01); G03F 1/00 (2006.01); G03C 11/00 (2006.01); H01L 21/00 (2006.01)

U.S. Cl. 206—316.1  [430/5; 430/644; 438/800]

31 Claims

27. An apparatus for storing and transporting a photomask comprising a photomask storage container having fluid-tight walls, an opening for moving the photomask into and out of the container, and a sealable inlet for a storage liquid; a photomask in the storage container; and a storage liquid around the photomask, the storage liquid being essentially inert with respect to the photomask and essentially free of photomask contaminant, whereby the photomask may be placed in the storage container through the opening and the storage liquid may be introduced into the container through the inlet to provide an environment around the photomask essentially inert with respect to the photomask and essentially free of photomask contaminant.