| US 7,536,923 B2 | ||
| Force sensor chip | ||
| Yusuke Hirabayashi, Wako (Japan); Nobuhiro Sakurai, Wako (Japan); and Takeshi Ohsato, Wako (Japan) | ||
| Assigned to Honda Motor Co., Ltd., Tokyo (Japan) | ||
| Filed on May 01, 2007, as Appl. No. 11/797,173. | ||
| Claims priority of application No. P2006-128384 (JP), filed on May 02, 2006. | ||
| Prior Publication US 2007/0266797 A1, Nov. 22, 2007 | ||
| Int. Cl. G01L 1/22 (2006.01) | ||
| U.S. Cl. 73—862.044 [73/862.041] | 12 Claims |
| 1. A force sensor chip having a multiaxial force sensing function, comprising:
a base member having an operating part provided with an external action area part, a supporting part for supporting the operating
part, and connecting parts which connects the operating part and the supporting part, the base member having a top surface,
a bottom surface and a thickness between the top surface and bottom surface; and
strain resistance elements disposed in the connecting parts or within boundaries between the connecting parts and the operating
part,
wherein the base member has an area of reduced thickness, the area of reduced thickness is configured to include as a whole
each of the connecting parts, and the area of reduced thickness has a first boundary disposed in the supporting part and a
second boundary disposed in the operating part, the first boundary being neither disposed in said connecting part nor coincident
with a junction between each said connecting part and the supporting part, the second boundary being neither disposed in each
said connecting part nor coincident with a junction between each said connecting part and the operating part.
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