| US 7,536,922 B2 | ||
| Force sensor chip | ||
| Nobuhiro Sakurai, Wako (Japan); and Takeshi Ohsato, Wako (Japan) | ||
| Assigned to Honda Motor Co., Ltd., Tokyo (Japan) | ||
| Filed on Aug. 13, 2007, as Appl. No. 11/889,438. | ||
| Claims priority of application No. 2006-234513 (JP), filed on Aug. 30, 2006. | ||
| Prior Publication US 2008/0053247 A1, Mar. 06, 2008 | ||
| Int. Cl. G01D 7/00 (2006.01) | ||
| U.S. Cl. 73—862.041 | 12 Claims |
| 1. A force sensor chip, comprising:
a base member including
a plurality of operating parts, each operating part including an external-force acting area section and a non-deforming section,
a supporting part configured to support said operating parts, and
a plurality of connecting parts configured to connect said operating parts and said supporting part; and
strain resistance elements provided on deformation-generating sections of said connecting parts, wherein
said plurality of operating parts are provided, in corresponding relation to said plurality of connecting parts, between said
connecting parts and said supporting part,
said plurality of operation parts, said supporting part and said plurality of connecting parts are functionally separated
from one another by a plurality of elongated through-holes formed in the base member, and
each of said connecting parts includes an elastic section and a connecting arm section, and the external force acting area
section of each of said operating parts is disposed at both sides of one of said connecting arm sections.
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