US 7,536,917 B2
Pressure sensor
Hironobu Baba, Obu (Japan)
Assigned to DENSO CORPORATION, Kariya (Japan)
Filed on Jan. 17, 2008, as Appl. No. 12/7,913.
Claims priority of application No. 2007-033507 (JP), filed on Feb. 14, 2007.
Prior Publication US 2008/0190209 A1, Aug. 14, 2008
Int. Cl. G01L 9/00 (2006.01)
U.S. Cl. 73—754  [73/756] 10 Claims
OG exemplary drawing
 
1. A pressure sensor for detecting a pressure of a pressure medium, the pressure sensor comprising:
a case body having a box shape and including a pressure introduction port for introducing the pressure medium therein;
a sensor chip having a plate shape and including a top surface and a bottom surface opposite to the top surface, wherein the sensor chip further includes a sensing member disposed on the top surface of the sensor chip and a concave member disposed on the bottom surface of the sensor chip, and wherein the concave member has a concave portion;
a ceramic substrate having a plate shape and including a front surface and a rear surface opposite to the front surface, wherein the ceramic substrate further includes a front opening disposed on the front surface of the ceramic substrate and a rear opening disposed on the rear surface of the ceramic substrate, and wherein the front opening is spatially coupled with the rear opening across the ceramic substrate;
a gel member; and
a lid member, wherein
the sensor chip is disposed on the front surface of the ceramic substrate such that the concave member of the sensor chip is disposed on the front opening,
the case body accommodates the ceramic substrate such that the rear opening of the ceramic substrate is coupled with the pressure introduction port,
the gel member is disposed in the front opening and the rear opening, and covers the concave member of the sensor chip,
the concave member of the sensor chip receives the pressure of the pressure medium via the gel member, the pressure medium being introduced in the pressure introduction port,
the sensing member of the sensor chip detects the pressure of the pressure medium,
the lid member covers the case body such that the lid member opposes the ceramic substrate and such that an inside space of the case body is hermetically sealed with the lid member, and
the lid member includes a protruding member disposed on a surface portion of the lid member, and the surface portion faces the ceramic substrate.