| US 7,536,778 B1 | ||
| Method of fabrication for slider with underpass leads | ||
| Amanda Baer, Campbell, Calif. (US); Tsung Yuan Chen, San Jose, Calif. (US); David Patrick Druist, San Jose, Calif. (US); and Edward Hin Pong Lee, San Jose, Calif. (US) | ||
| Assigned to Hitachi Global Storage Technologies Netherlands B.V., Amsterdam (Netherlands) | ||
| Filed on Sep. 05, 2007, as Appl. No. 11/899,603. | ||
| Application 11/899603 is a division of application No. 10/881196, filed on Jun. 29, 2004, granted, now 7,362,542. | ||
| Int. Cl. G11B 5/127 (2006.01); H04R 31/00 (2006.01) | ||
| U.S. Cl. 29—603.16 [29/603.08; 29/603.12; 29/603.13; 29/603.15; 29/603.18; 216/62; 216/65; 216/66; 360/121; 360/122; 360/317; 451/5; 451/41] | 6 Claims |
| 1. A method of fabrication of a slider with underpass leads, said slider having sites for fabrication of a continuous coil
having a set of front coils and a set of back coils and a center tab, said method comprising:
A) fabricating a first shield layer, a read head sensor, a second shield layer and a substrate layer to produce an upper surface
which includes said second shield layer on a site for the front coils and a portion of said substrate layer on a site for
said back coils;
B) depositing an insulation layer upon said upper surface formed by said second shield layer which serves as the site for
said front coils, also depositing said insulation layer on said portion of said substrate layer which serves as the site for
said back coils;
C) fabricating at least one underpass lead layer upon said insulation layer covering said portion of said substrate layer
which serves as the site for said back coils;
D) fabricating a lower write pole on said insulation layer covering said second shield layer which serves as the site for
said front coils, also fabricating a coil interconnect on said underpass lead layer;
E) filling with a fill material and forming a flat top surface by CMP;
F) depositing an insulation material on said flat top surface and forming a pole gap which reaches to a portion of said lower
write pole and a center tab gap in said insulation material which reach to a portion of said coil interconnect, the remaining
insulating material on said lower write pole for forming the site for front coils and the remaining insulating material on
said at least one underpass lead, for forming the site for back coils; and
G) fabricating said continuous coil so that said front coils are formed on said site for front coils, said back coils are
formed on said site for back coils, and said center tab is formed on said center tab gap.
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