	US 7,535,552 B2
	Moving/guiding apparatus and exposure apparatus using the same
Shigeo Sakino, Kanagawa (Japan)
Assigned to Canon Kabushiki Kaisha, Tokyo (Japan)
Filed on Mar. 05, 2002, as Appl. No. 10/90,163.
Claims priority of application No. 2001-066531 (JP), filed on Mar. 09, 2001.
Prior Publication US 2002/0128733 A1, Sep. 12, 2002
Int. Cl. G03B 27/58 (2006.01); G03B 27/62 (2006.01); G05G 11/00 (2006.01)

U.S. Cl. 355—72 [355/75; 74/490.09]

8 Claims

1. A moving/guiding apparatus comprising:

a first movable body and a second movable body guided to move in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction;

first and second actuators for driving said first and second movable bodies in the intersecting directions;

a third movable body guided to be movable on a surface plate in a moving direction of said first movable body and in a moving direction of said second movable body, and driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of said first and second movable bodies;

first and second radial bearings for guiding one side of said first movable body and one side of said second movable body, respectively, and restraining said first and second movable bodies, respectively, in all directions, except for the movable direction; and

third and fourth bearings for guiding the other side of said first movable body and the other side of said second movable body, respectively, and restraining said first and second movable bodies in the vertical direction.