| US 7,535,157 B2 | ||
| Piezoelectric element, actuator device, liquid-jet head, and liquid-jet apparatus | ||
| Takeshi Saito, Matsumoto-shi, Nagano-ken (Japan) | ||
| Assigned to Seiko Epson Corporation, Tokyo (Japan) | ||
| Filed on Sep. 06, 2007, as Appl. No. 11/851,196. | ||
| Claims priority of application No. 2006-243769 (JP), filed on Sep. 08, 2006; and application No. 2007-205320 (JP), filed on Aug. 07, 2007. | ||
| Prior Publication US 2008/0062228 A1, Mar. 13, 2008 | ||
| Int. Cl. H01L 41/047 (2006.01); B41J 2/045 (2006.01) | ||
| U.S. Cl. 310—363 [310/365; 310/366; 347/68] | 9 Claims |
| 1. A piezoelectric element comprising:
a lower electrode film;
a piezoelectric layer provided on the lower electrode film; and
an upper electrode film provided above the piezoelectric layer,
wherein the lower electrode film includes columnar crystals of platinum, an oxide in grain boundaries of the crystals of platinum,
and a layer made of the oxide on the crystals of platinum.
|