| US 7,531,948 B2 | ||
| Stacked piezoelectric element, manufacturing method thereof and vibration wave driving apparatus | ||
| Yutaka Maruyama, Taito-ku (Japan); Kaishi Ohashi, Ohta-ku (Japan); and Takayuki Tsukimoto, Fujisawa (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on May 15, 2007, as Appl. No. 11/748,701. | ||
| Claims priority of application No. 2006-135598 (JP), filed on May 15, 2006. | ||
| Prior Publication US 2007/0262679 A1, Nov. 15, 2007 | ||
| Int. Cl. H01L 41/00 (2006.01) | ||
| U.S. Cl. 310—369 [310/323.12; 310/323.16; 310/365; 310/366] | 8 Claims |
| 1. A stacked piezoelectric element comprising:
a plurality of discrete cylindrical piezoelectric layers having different diameters inserted coaxially relative to each other
and forming a cylindrically-shaped piezoelectric element; and
an electrode layer on a circumferential surface of each of the cylindrical piezoelectric layers,
wherein each of the electrode layers is divided into a plurality of discrete electrode layer regions along the circumferential
surface of the respective cylindrical piezoelectric layer.
|