US 7,531,821 B2
Imprint apparatus and imprint method including dual movable image pick-up device
Nobuhito Suehira, Kawasaki (Japan); Junichi Seki, Yokohama (Japan); Hideki Ina, Tokyo (Japan); and Koichi Sentoku, Kawachi-gun (Japan)
Assigned to Canon Kabushiki Kaisha, Tokyo (Japan)
Filed on Sep. 06, 2007, as Appl. No. 11/851,006.
Claims priority of application No. 2006-257713 (JP), filed on Sep. 22, 2006; and application No. 2007-206093 (JP), filed on Aug. 08, 2007.
Prior Publication US 2008/0073604 A1, Mar. 27, 2008
Int. Cl. G01N 21/86 (2006.01)
U.S. Cl. 250—559.3  [250/548] 21 Claims
OG exemplary drawing
 
1. An imprint apparatus, comprising:
a first holder for holding a mold having an imprint pattern;
a second holder arranged in opposition to the mold for holding a workpiece to which the imprint pattern is transferred;
a first illumination system for irradiating a mark for determining a position of the mold and a mark for determining a position of the workpiece with light;
a first optical system for imaging the mark for determining the position of the mold at a first observation point by using the light from the first illumination system;
a second optical system for imaging the mark for determining the position of the workpiece at a second observation point;
an imaging optical system that belongs to both the first optical system and the second optical system;
a first image pick-up device for observing the mark for determining the position of the mold which is imaged at the first observation point;
a second image pick-up device for observing the mark for determining the position of the workpiece which is imaged at the second observation point; and
at least one drive mechanism of a first drive mechanism for moving the first image pick-up device while following movement of the first observation point which is caused by a change in distance between the mold and the imaging optical system and a second drive mechanism for moving the second image pick-up device while following movement of the second observation point which is caused by a change in distance between the workpiece and the imaging optical system.