| US 7,531,686 B2 | ||
| Salt suitable for an acid generator and a chemically amplified resist composition containing the same | ||
| Yukako Harada, Settsu (Japan); Isao Yoshida, Ikeda (Japan); and Satoshi Yamaguchi, Toyonaka (Japan) | ||
| Assigned to Sumitomo Chemical Company, Limited, Tokyo (Japan) | ||
| Filed on Oct. 26, 2006, as Appl. No. 11/586,638. | ||
| Claims priority of application No. 2005-314036 (JP), filed on Oct. 28, 2005. | ||
| Prior Publication US 2007/0100158 A1, May 03, 2007 | ||
| Int. Cl. C07C 69/74 (2006.01); C07C 303/00 (2006.01); G03C 1/00 (2006.01) | ||
| U.S. Cl. 560—117 [560/102; 560/116; 560/149; 430/270.1] | 17 Claims |
1. A salt of the formula (I):
 wherein ring X represents polycyclic hydrocarbon group having tricycle or more and having 10 to 30 carbon atoms, and one or
more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkoxy group having
1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms or cyano group; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; n is an integer of 1 to 12;
and A+ represents a cation selected from the group consisting of a cation of the following formulae (IIa), (IIb) and (IIc):
cation of the formula (IIa):
 wherein P1 and P2 each independently represent hydrogen atom, hydroxyl group, alkyl group having 1 to 12 carbon atoms or alkoxy group having
1 to 12 carbon atoms,
a cation of the formula (IIb):
 wherein P3 and P4 each independently represent alkyl group having 1 to 12 carbon atoms or cycloalkyl group having 3 to 12 carbon atoms, or P3 and P4 bond to form divalent acyclic hydrocarbon group having 3 to 12 carbon atoms which forms a ring together with the adjacent
S+, and one or more —CH2— in the divalent acyclic hydrocarbon group is optionally substituted with —CO—, —O— or —S—, P5 represents hydrogen atom, P6 represents alkyl group having 1 to 12 carbon atoms, cycloalkyl group having 3 to 12 carbon atoms or aromatic ring group optionally
substituted, or P5 and P6 bond to form divalent acyclic hydrocarbon group which forms 2-oxocycloalkyl together with the adjacent —CHCO—, and one or
more —CH2— in the divalent acyclic hydrocarbon group is optionally substituted with —CO—, —O— or —S—,
a cation of the formula (IIc):
 wherein P7, P8, P9, P10, P11, P12, P13, P14, P15, P16, P17 and P18 each independently represent hydrogen atom, hydroxyl group, alkyl group having 1 to 12 carbon atoms or alkoxy group having
1 to 12 carbon atoms, B represents sulfur atom or oxygen atom, and m is an integer of 0 or 1.
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