| US 7,531,371 B2 | ||
| Multisurfaced microdevice system array and a method of producing the array | ||
| John D. G. Rather, 102 Windsong La., Oak Ridge, Tenn. 37832 (US); and Gregory W. Auner, 16284 Aldrich Ct., Livonia, Mich. 48154 (US) | ||
| Filed on Feb. 21, 2006, as Appl. No. 11/361,730. | ||
| Prior Publication US 2007/0194442 A1, Aug. 23, 2007 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 438—24 [438/34; 438/50; 438/73] | 7 Claims |
| 1. A method of constructing a multisurfaced microdevice system array, the method comprising the steps of:
providing a plurality of semiconductor substrates each having a first and a second surface;
fabricating a plurality of sensing, controlling and actuating microdevices at locations on at least one of the first and second
surfaces of the plurality of substrates;
orienting at least one of the substrates to extend from another substrate to form a multisurfaced structure having a multifaced
configuration including at least two outer faces and at least two inner faces, the plurality of substrates and microdevices
forming a microdevice system; and
disposing a plurality of the microdevice systems to form a readily extendable microdevice system array, each microdevice system
of the array having the capability of communicating operating energy to at least one other microdevice system via at least
one of micromechanical linkages, fluidic ducts, electric conductors, contacts and plugs; electromagnetic and acoustic emitters
and receivers; and electromagnetic waveguides and data to at least one other microdevice system via emitters and receivers
for transferring electromagnetic energy, the array providing economical and efficient redundancies of microdevices to perform
a plurality of functions, some of which require specific microdevice orientations provided by angular dispositions, including
a straight angle of 180 degrees, of the surfaces of the multifaced microdevice systems.
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