| US 7,528,940 B2 | ||
| System and method for inspecting an object using an acousto-optic device | ||
| Alexander Veis, Kadima (Israel); and Yoram Saban, Shoham (Israel) | ||
| Assigned to Applied Materials, Israel, Ltd., Rehovot (Israel) | ||
| Filed on Oct. 30, 2006, as Appl. No. 11/554,513. | ||
| Prior Publication US 2008/0100830 A1, May 01, 2008 | ||
| Int. Cl. G01N 21/00 (2006.01) | ||
| U.S. Cl. 356—237.1 [356/237.2; 356/237.6; 359/298; 359/299; 359/305] | 20 Claims |
| 1. A system for inspecting a object, the system comprises:
a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the
traveling lens acousto-optic device;
a first scanner, adapted to scan a beam of light across and in synchronization with the traveling lens while the traveling
lens is propagating through the active region of the traveling lens acousto-optic device;
a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating
light beams;
multiple detectors;
an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beam towards
multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the
multiple collected light beams towards the multiple detectors;
wherein each detector is associated with an area of the multiple areas.
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