| US 7,527,545 B2 | ||
| Methods and tools for controlling the removal of material from microfeature workpieces | ||
| Nagasubramaniyan Chandrasekaran, Boise, Id. (US); Rajshree Kothari, Boise, Id. (US); Gundu M. Sabde, Boise, Id. (US); and James J. Hofmann, Boise, Id. (US) | ||
| Assigned to Micron Technology, Inc., Boise, Id. (US) | ||
| Filed on Aug. 28, 2006, as Appl. No. 11/511,689. | ||
| Prior Publication US 2008/0051007 A1, Feb. 28, 2008 | ||
| Int. Cl. B24B 7/22 (2006.01); B24B 49/12 (2006.01) | ||
| U.S. Cl. 451—6 [451/41] | 32 Claims |
| 1. A method of controlling abrasive removal of material from a microfeature workpiece, comprising:
irradiating a periodic structure on the workpiece;
obtaining an intensity distribution of radiation returning from the periodic structure;
correlating the obtained intensity distribution to a dimension of the periodic structure based on a predetermined relationship
between the dimension of the periodic structure and the intensity distribution; and
outputting a control signal based on the dimension of the periodic structure.
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