| US 7,526,143 B2 | ||
| Imaging method | ||
| Kohei Yamaguchi, Hitachinaka (Japan); Kazuo Aoki, Hitachinaka (Japan); and Kenji Obara, Kawasaki (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Apr. 26, 2006, as Appl. No. 11/411,154. | ||
| Claims priority of application No. 2005-132677 (JP), filed on Apr. 28, 2005. | ||
| Prior Publication US 2006/0243905 A1, Nov. 02, 2006 | ||
| Int. Cl. G06K 9/36 (2006.01) | ||
| U.S. Cl. 382—276 [382/219; 382/291; 358/538; 358/452] | 9 Claims |
| 1. An imaging method, comprising the steps of:
acquiring plural pieces of specimen images while displacing a field-of-view on said specimen,
grouping said plural pieces of specimen images into plural groups, each of said plural groups including plural pieces of specimen
images which are continuously acquired, and integrating said specimen images on each group basis, and thereby creating integrated
images whose number is equal to the number of said groups, said specimen images belonging to each group,
calculating image displacement quantity between said integrated images,
determining a relationship between specimen-images acquisition time and said image displacement quantity from calculation
result of said image displacement quantity,
applying said determined relationship, and thereby calculating image displacement quantity for each of said plural pieces
of specimen images, and
making position corrections to said plural pieces of specimen images based on said calculated image displacement quantities,
and after that, integrating said corrected specimen images thereby to reconfigure images, wherein said steps are implemented
by at least one computer or processor.
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