| US 7,525,713 B2 | ||
| Optical device | ||
| Ryosuke Nakamura, Nagano (Japan) | ||
| Assigned to Seiko Epson Corporation, (Japan) | ||
| Filed on Jan. 18, 2007, as Appl. No. 11/654,795. | ||
| Claims priority of application No. 2006-011548 (JP), filed on Jan. 18, 2006. | ||
| Prior Publication US 2007/0171531 A1, Jul. 26, 2007 | ||
| Int. Cl. G02F 1/03 (2006.01); G02B 26/00 (2006.01) | ||
| U.S. Cl. 359—260 [359/290] | 23 Claims |
| 1. An optical device comprising:
a fixed portion comprised of a substrate, the substrate having a first recess having a bottom and a second recess formed in
the bottom of the first recess, and the second recess having a bottom, wherein the fixed portion further includes a first
light reflection portion formed on the bottom of the second recess and detection electrodes formed on the bottom of the second
recess so as to surround the first light reflection portion;
a movable portion having a first surface that faces the fixed portion and a second surface opposite to the first surface,
the movable portion having a second light reflection portion formed on the first surface of the movable portion, the second
light reflection portion facing the first light reflection portion with a first gap being formed between the first light reflection
portion and the second light reflection portion, the movable portion being movable with respect to the fixed portion so as
to change the first gap between the first light reflection portion and the second light reflection portion, the first light
reflection portion and the second light reflection portion being configured to reflect light that enters into the optical
device repeatedly between the first light reflection portion and the second light reflection portion so as to cause interference
and emit light having a wavelength corresponding to a size of the first gap to exit outside of the optical device;
a first drive electrode portion facing the second light reflection portion near the first light reflection portion with a
second gap being formed between the second light reflection portion and the first drive electrode portion, wherein in the
first drive electrode portion is disposed on the bottom of the first recess;
a second drive electrode portion facing the second surface of the movable portion with a third gap being formed between the
second surface of the movable portion and the second drive electrode portion; and
a circuit operable to generate a potential difference between the first drive electrode portion, the second drive electrode
portion, and the movable portion so as to generate an electrostatic attraction force therebetween for changing a position
and/or a posture of the movable portion.
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