| US 7,525,644 B2 | ||
| Container and exposure apparatus having the same | ||
| Hirofumi Fujii, Utsunomiya (Japan); and Mitsuo Nishimura, Kawasaki (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Jan. 27, 2006, as Appl. No. 11/275,769. | ||
| Claims priority of application No. 2005-034404 (JP), filed on Feb. 10, 2005. | ||
| Prior Publication US 2006/0174837 A1, Aug. 10, 2006 | ||
| Int. Cl. G03B 27/62 (2006.01); G03B 27/58 (2006.01) | ||
| U.S. Cl. 355—75 [355/72] | 11 Claims |
| 1. A container comprising:
at least two structural members welded to each other to define an inside space; and
a material containing an organic compound provided in the inside space,
wherein at least one structural member of said at least two structural members has (i) a groove formed between a welded portion
thereof and the material and configured to release the organic compound, as the organic compound is vaporized when the structural
members are welded to each other, and (ii) a communication member configured to communicate the groove and an outside space
of said container with each other, so that the vaporized organic compound is exhausted to the outside space.
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