| US 7,525,068 B2 | ||
| Heating system of batch type reaction chamber and method thereof | ||
| Taek Yong Jang, Suwon (Korea, Republic of); Byoung Il Lee, Seongnam (Korea, Republic of); and Young Ho Lee, Yongin (Korea, Republic of) | ||
| Assigned to Terasemicon Co., Ltd, Hwasung, Gyeonggi-Do (Korea, Republic of) | ||
| Filed on Aug. 31, 2006, as Appl. No. 11/513,732. | ||
| Claims priority of application No. 10-2006-0004393 (KR), filed on Jan. 16, 2006; and application No. 10-2006-0069261 (KR), filed on Jul. 24, 2006. | ||
| Prior Publication US 2007/0166656 A1, Jul. 19, 2007 | ||
| Int. Cl. F27B 5/14 (2006.01); F26B 19/00 (2006.01) | ||
| U.S. Cl. 219—390 [219/405; 219/411; 392/416; 392/418; 118/724; 118/725; 118/50.1] | 10 Claims |
| 1. A heating system of a batch type reaction chamber comprising:
a reaction chamber is configured to form a process space;
a heating apparatus having a plurality of heating groups is formed along an outer circumference of the reaction chamber, wherein
each of the heating groups has a plurality of heating units formed to divide heating areas at right angles and each of the
heating groups is connected to each supplying line having a separate thermostat, wherein each of the heating units is in the
shape of a character “U” and a horizontal connecting portion of each of the heating units is an additional heating portion;
a reflecting device having a reflecting plate is configured to reflect the radiant heat radiated from the heating apparatus
into an inside of the reaction chamber arranged around the heating apparatus; and
a cooling waterway is configured to exchange a heat and to prevent heat damage.
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