| US 7,524,528 B2 | ||
| Precursor compositions and methods for the deposition of passive electrical components on a substrate | ||
| Toivo T. Kodas, Albuquerque, N. Mex. (US); Mark J. Hampden-Smith, Albuquerque, N. Mex. (US); Karel Vanheusden, Placitas, N. Mex. (US); Hugh Denham, Albuquerque, N. Mex. (US); Aaron D. Stump, Albuquerque, N. Mex. (US); Allen B. Schult, Albuquerque, N. Mex. (US); Paolina Atanassova, Albuquerque, N. Mex. (US); and Klaus Kunze, Half Moon Bay, Calif. (US) | ||
| Assigned to Cabot Corporation, Boston, Mass. (US) | ||
| Filed on Oct. 04, 2002, as Appl. No. 10/265,070. | ||
| Claims priority of provisional application 60/338797, filed on Nov. 02, 2001. | ||
| Claims priority of provisional application 60/327620, filed on Oct. 05, 2001. | ||
| Prior Publication US 2003/0175411 A1, Sep. 18, 2003 | ||
| Int. Cl. B05D 5/12 (2006.01); B05D 3/00 (2006.01); H01C 17/28 (2006.01) | ||
| U.S. Cl. 427—101 [427/102; 427/299; 427/372.2; 29/620] | 38 Claims |
| 1. A method for the fabrication of an inorganic resistor on a substrate, comprising the steps of:
(a) providing a substrate;
(b) depositing a resistor precursor composition onto said substrate using a direct-write tool, said resistor precursor composition
having a viscosity of not greater than about 100 centipoise and comprising:
i) at least a first molecular precursor compound; and
ii) at least first particles selected from the group consisting of metal particles, metal oxide particles and carbon and carbon
particles;
(c) heating said resistor precursor composition to a temperature of not greater than about 350° C. to convert said resistor
precursor composition to an inorganic resistor.
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