US 7,524,475 B2
Cerium oxide powder for one-component CMP slurry, preparation method thereof, one-component CMP slurry composition comprising the same, and method of shallow trench isolation using the slurry
Seung Beom Cho, Daejeon (Korea, Republic of); Jun Seok Nho, Daejeon (Korea, Republic of); Dong Mok Shin, Daejeon (Korea, Republic of); Jong Pil Kim, Daejeon (Korea, Republic of); Myoung Hwan Oh, Daejeon (Korea, Republic of); Jang Yul Kim, Daejeon (Korea, Republic of); Eun Mi Choi, Seongnam-si (Korea, Republic of); and Min Jin Ko, Daejeon (Korea, Republic of)
Assigned to LG Chem, Ltd., Seoul (Korea, Republic of)
Filed on Sep. 01, 2006, as Appl. No. 11/514,309.
Claims priority of application No. 10-2005-0081734 (KR), filed on Sep. 02, 2005; and application No. 10-2005-0097157 (KR), filed on Oct. 14, 2005.
Prior Publication US 2007/0081931 A1, Apr. 12, 2007
Int. Cl. B01J 23/10 (2006.01); B22F 9/00 (2006.01); B24B 1/00 (2006.01); C01F 17/00 (2006.01); C09G 1/02 (2006.01)
U.S. Cl. 423—263  [423/266; 502/302; 502/304; 438/692; 438/693; 51/293; 51/296; 51/307; 51/309; 419/45; 419/53; 419/54; 419/55] 22 Claims
OG exemplary drawing
 
1. Cerium oxide powder for one-component CMP slurry, which has a specific surface area of 5 m2/g or more, and a ratio of volume fraction of pores with a diameter of 3 nm or more to that of pores with a diameter less than 3 nm of 8:2˜2:8.