| US 7,524,396 B2 | ||
| Object processing apparatus and processing method | ||
| Yuichi Masaki, Kawasaki (Japan); and Yasushi Fujisawa, Isehara (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Feb. 09, 2005, as Appl. No. 11/53,268. | ||
| Claims priority of application No. 2004-035547 (JP), filed on Feb. 12, 2004. | ||
| Prior Publication US 2005/0178409 A1, Aug. 18, 2005 | ||
| Int. Cl. B08B 3/00 (2006.01); F25J 3/00 (2006.01); H01L 21/304 (2006.01) | ||
| U.S. Cl. 156—345.17 [134/76; 134/98.1; 156/345.11] | 6 Claims |
| 1. A processing apparatus for processing an object with a liquid, comprising:
a processing bath having a liquid injection port at a bottom of said processing bath;
a rectifier plate located between the bottom and a position at which an object to be processed is positioned; and
a distribution portion extending between said rectifier plate and said liquid injection port and over said liquid injection
port, and spaced apart from the bottom of said processing bath,
said distribution portion including
an opposing portion opposing said liquid injection port,
a surrounding portion having a tubular shape surrounding a space between said opposing portion and said liquid injection port,
and
an extended portion extending radially and outwardly from a bottom end of said surrounding portion.
|