US 7,524,376 B2
Method and apparatus for aluminum nitride monocrystal boule growth
Shaoping Wang, Brookfield, Conn. (US)
Assigned to Fairfield Crystal Technology, LLC, New Milford, Conn. (US)
Filed on Apr. 25, 2007, as Appl. No. 11/789,590.
Claims priority of provisional application 60/797470, filed on May 04, 2006.
Prior Publication US 2007/0256630 A1, Nov. 08, 2007
Int. Cl. C30B 35/00 (2006.01)
U.S. Cl. 117—200  [117/84; 117/85; 117/89; 117/93; 117/94; 117/100; 117/109] 2 Claims
OG exemplary drawing
 
1. A crystal growth setup within a physical vapor transport growth furnace system for producing AlN monocrystal boules at high temperatures, comprising:
a. a crucible effective to contain an AlN source material and a growing AlN crystal boule, said crucible having a thin wall thickness in at least that portion housing said growing AlN crystal boule;
b. a mechanical seal sealing an end piece to said crucible, said mechanical seal effective to substantially prevent aluminum vapor diffusion while enabling nitrogen and argon diffusion to thereby maintain a substantially uniform total pressure in the interior and the exterior of said crucible;
c. a susceptor, in case of an inductive heating, or a heater, in case of a resistive heating, made from a material selected from the group consisting of purified graphite solid with an ash content <50 ppm tantalum, tantalum carbide, tantalum nitride, niobium carbide and niobium nitride, all with a purity, by weight, >99.9%;
d. a thermal insulation enclosing said susceptor or heater effective to provide a thermal gradient inside said crucible in the range of 5-100° C./cm, said thermal insulation being a material selected from the group consisting of graphite thermal insulation, rigid or flexible graphite fiber insulation and graphite powder, all with ash content >100 ppm, Ta, TaC, Nb, NbC, TaN, NbN powders, all with a purity, by weight, >99.9; and
e. a furnace chamber capable of being operated from a vacuum (<0.1 torr) to a gas pressure of at least 4000 torr through filling or flowing a nitrogen gas or a mixture of nitrogen gas and argon gas.