| US 7,524,376 B2 | ||
| Method and apparatus for aluminum nitride monocrystal boule growth | ||
| Shaoping Wang, Brookfield, Conn. (US) | ||
| Assigned to Fairfield Crystal Technology, LLC, New Milford, Conn. (US) | ||
| Filed on Apr. 25, 2007, as Appl. No. 11/789,590. | ||
| Claims priority of provisional application 60/797470, filed on May 04, 2006. | ||
| Prior Publication US 2007/0256630 A1, Nov. 08, 2007 | ||
| Int. Cl. C30B 35/00 (2006.01) | ||
| U.S. Cl. 117—200 [117/84; 117/85; 117/89; 117/93; 117/94; 117/100; 117/109] | 2 Claims |

| 1. A crystal growth setup within a physical vapor transport growth furnace system for producing AlN monocrystal boules at
high temperatures, comprising:
a. a crucible effective to contain an AlN source material and a growing AlN crystal boule, said crucible having a thin wall
thickness in at least that portion housing said growing AlN crystal boule;
b. a mechanical seal sealing an end piece to said crucible, said mechanical seal effective to substantially prevent aluminum
vapor diffusion while enabling nitrogen and argon diffusion to thereby maintain a substantially uniform total pressure in
the interior and the exterior of said crucible;
c. a susceptor, in case of an inductive heating, or a heater, in case of a resistive heating, made from a material selected
from the group consisting of purified graphite solid with an ash content <50 ppm tantalum, tantalum carbide, tantalum nitride,
niobium carbide and niobium nitride, all with a purity, by weight, >99.9%;
d. a thermal insulation enclosing said susceptor or heater effective to provide a thermal gradient inside said crucible in
the range of 5-100° C./cm, said thermal insulation being a material selected from the group consisting of graphite thermal
insulation, rigid or flexible graphite fiber insulation and graphite powder, all with ash content >100 ppm, Ta, TaC, Nb, NbC,
TaN, NbN powders, all with a purity, by weight, >99.9; and
e. a furnace chamber capable of being operated from a vacuum (<0.1 torr) to a gas pressure of at least 4000 torr through filling
or flowing a nitrogen gas or a mixture of nitrogen gas and argon gas.
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