| US 7,523,553 B2 | ||
| Method of manufacturing ink jet recording head | ||
| Masaki Ohsumi, Yokosuka (Japan); Shuji Koyama, Kawasaki (Japan); Yoshinori Tagawa, Yokohama (Japan); Hiroyuki Murayama, Kawasaki (Japan); Kenji Fujii, Kawasaki (Japan); Yoshinobu Urayama, Fujisawa (Japan); and Jun Yamamuro, Yokohama (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Jan. 31, 2007, as Appl. No. 11/669,535. | ||
| Claims priority of application No. 2006-025777 (JP), filed on Feb. 02, 2006. | ||
| Prior Publication US 2007/0178248 A1, Aug. 02, 2007 | ||
| Int. Cl. B23P 17/00 (2006.01) | ||
| U.S. Cl. 29—890.1 [29/890.09; 216/27; 347/65] | 5 Claims |
| 1. A method of manufacturing an ink jet recording head including a substrate equipped with an energy generating element for
generating energy to discharge ink and a supply port for supplying the ink to the energy generating element, a discharge port
for discharging the ink, and a flow path forming member for forming a flow path for allowing communication between the discharge
port and the supply port, said method comprising the steps of:
providing an adhesive material for forming an adhesive layer on the substrate;
providing a photosensitive material containing a photosensitive resin on the adhesive material, and performing exposure and
development to form a side wall forming member for forming a side wall of the flow path;
patterning the adhesive material using the side wall forming member as masks to form the adhesive layer;
placing a ceiling layer on the side wall forming member, the ceiling layer being a part of the flow path forming member; and
forming the discharge port in the ceiling layer.
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