| US 7,522,330 B2 | ||
| High fill ratio silicon spatial light modulator | ||
| Xiao Yang, Cupertino, Calif. (US); Yuxiang Wang, Palo Alto, Calif. (US); Wook Ji, San Jose, Calif. (US); Justin Allen Payne, San Jose, Calif. (US); Ye Wang, Santa Clara, Calif. (US); William Spencer Worley, III, Half Moon Bay, Calif. (US); Dongmin Chen, Saratoga, Calif. (US); and Howard Woo, San Jose, Calif. (US) | ||
| Assigned to Miradia Inc., Sunnyvale, Calif. (US) | ||
| Filed on Jun. 05, 2006, as Appl. No. 11/448,149. | ||
| Claims priority of provisional application 60/731378, filed on Oct. 28, 2005. | ||
| Prior Publication US 2007/0097487 A1, May 03, 2007 | ||
| Int. Cl. G02B 26/00 (2006.01) | ||
| U.S. Cl. 359—291 [359/292] | 70 Claims |
| 1. An optical deflection device for a display application, the optical deflection device comprising:
a semiconductor substrate comprising an upper surface region;
one or more electrode devices provided overlying the upper surface region;
a bias structure coupled to the upper surface region;
an insulating layer coupled to the bias structure and extending a predetermined distance from the upper surface region;
a hinge device comprising a silicon material, wherein the hinge device is coupled to the upper surface region and to the insulating
layer;
a via plug passing through a via defined in the insulating layer between the bias structure and the hinge device;
a spacing defined between the upper surface region and the hinge device; and
a mirror structure comprising:
a post portion coupled to the hinge device, and
a mirror plate portion coupled to the post portion and overlying the hinge device.
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