US 7,521,702 B2
	Extreme ultraviolet light source and extreme ultraviolet light source target
Keiji Nagai, Suita (Japan); Hiroaki Nishimura, Suita (Japan); Takayoshi Norimatsu, Suita (Japan); Katsunobu Nishihara, Suita (Japan); Noriaki Miyanaga, Suita (Japan); Masahiro Nakatsuka, Suita (Japan); Yasukazu Izawa, Suita (Japan); Tatsuhiko Yamanaka, Suita (Japan); Mitsuo Nakai, Suita (Japan); Keisuke Shigemori, Suita (Japan); Masakatsu Murakami, Suita (Japan); Yoshinori Shimada, Osaka (Japan); Shigeaki Uchida, Osaka (Japan); Hiroyuki Furukawa, Osaka (Japan); Atsushi Sunahara, Osaka (Japan); Vasilli Zhakhovski, Osaka (Japan); Ryouji Matsui, Suita (Japan); Takahiro Hibino, Suita (Japan); and Tomoharu Okuno, Suita (Japan)
Assigned to Osaka University, Osaka (Japan)
Appl. No. 10/550,800 PCT Filed Dec. 26, 2003, PCT No. PCT/JP03/16947 § 371(c)(1), (2), (4) Date Oct. 28, 2005, PCT Pub. No. WO2004/086467, PCT Pub. Date Oct. 07, 2004.
Claims priority of application No. 2003-085584 (JP), filed on Mar. 26, 2003.
Prior Publication US 2006/0133574 A1, Jun. 22, 2006
Int. Cl. G03F 7/20 (2006.01); H05G 2/00 (2006.01)

U.S. Cl. 250—504R

16 Claims

1. An extreme ultraviolet light source comprising an extreme ultraviolet light source target made of a gel containing heavy metal or heavy-metal compound, and a density of the heavy metal or the heavy-metal compound is 0.5% to 80% of the density of a crystal of the heavy metal or the heavy-metal compound.