| US 7,520,244 B2 | ||
| Plasma treatment apparatus | ||
| Takayuki Yamagishi, Tama (Japan); Hiroki Arai, Tama (Japan); and Kiyoshi Satoh, Tama (Japan) | ||
| Assigned to ASM Japan K.K., Tokyo (Japan) | ||
| Filed on Mar. 23, 2004, as Appl. No. 10/807,528. | ||
| Claims priority of application No. 2003-101993 (JP), filed on Apr. 04, 2003. | ||
| Prior Publication US 2004/0194709 A1, Oct. 07, 2004 | ||
| Int. Cl. C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01J 7/24 (2006.01); H05B 31/26 (2006.01) | ||
| U.S. Cl. 118—723E [156/345.43; 156/345.44; 156/345.47; 315/111.21; 315/111.91] | 18 Claims |
| 1. A plasma treatment apparatus for thin-film deposition comprising:
a reactor chamber;
a pair of parallel-plate electrodes disposed inside the chamber, between which a thin film is to be formed on a substrate;
and
a radio-frequency power supply system used for transmitting radio-frequency power to one of the parallel-plate electrodes
via multiple supply points provided on the one of the parallel-plate electrodes,
said radio-frequency power supply system comprises:
a radio-frequency power source; and
a radio-frequency transmission unit for transmitting radio-frequency power from the radio-frequency power source simultaneously
to the multiple supply points of the one of the parallel-plate electrodes,
said radio-frequency transmission unit comprising:
an inlet transmission path and multiple branches branched off from the inlet transmission path, wherein each branch connected
to the supply point of the parallel-electrode is multiple branchings downstream of the inlet transmission path and has a substantially
equal characteristic impedance value, said multiple branchings including a first branching and a second branching downstream
of the first branching; and
at least one inductance adjuster which is removably installed in each branch to render substantially equal the characteristic
impedance value of each branch connected to the multiple supply points,
wherein each branch comprises a hollow copper tube as an inductor,
each inductance adjuster is a ferrite core which removably encircles the hollow copper tube to adjust an impedance value of
the transmission system,
the hollow copper tube of the second branching is smaller in diameter than the hollow copper tube of the first branching,
and
the ferrite core encircling the hollow copper tube of the second branching is smaller than the ferrite core encircling the
hollow copper tube of the first branching.
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