| US 7,518,389 B2 | ||
| Interface assembly and dry gas enclosing apparatus using same | ||
| Akihiko Goto, Nishitama-gun (Japan) | ||
| Assigned to Agilent Technologies, Inc., Santa Clara, Calif. (US) | ||
| Filed on Apr. 20, 2006, as Appl. No. 11/407,479. | ||
| Claims priority of application No. P2005-142979 (JP), filed on May 16, 2005. | ||
| Prior Publication US 2006/0255821 A1, Nov. 16, 2006 | ||
| Int. Cl. G01R 31/02 (2006.01); G01R 31/28 (2006.01) | ||
| U.S. Cl. 324—760 [324/754; 324/158.1] | 4 Claims |
| 1. An interface assembly provided at a test head, for connecting a probe card having a mating coaxial connector to the test
head, the interface assembly being in communication with a dry gas generator for selectively introducing a dry gas therebetween
the test head and probe card, the interface assembly comprising:
an interface comprising an interface body, wherein the interface body has a first surface and an opposed second surface and
a plurality of openings being defined therethrough the interface body, and at least one coaxial connector mounted therein
a respective opening of the plurality of openings and extending outwardly therefrom the first surface of the interface body,
wherein the at least one coaxial connector is configured to selectively engage the mating coaxial connector of the probe card;
a casing having an annular open edge;
a ring plate comprising an annular plate section that defines an annular opening and a support column that surrounds the annular
opening and extends upwardly therefrom a plane bisecting the annular plate section, wherein the annular plate section of the
ring plate is sealingly connected to the annular open edge of the casing; and
a means for mounting the interface body thereon at least a portion of the support column of the ring plate so that at least
one first gap is formed therebetween a portion of at least one of the plurality of openings of the interface body and at least
a portion of the support column and so that the second surface of the interface body overlies the annular opening of the ring
plate and is substantially parallel to and spaced from the plane bisecting the annular plate section of the ring plate so
that a second gap is formed therebetween the interface body and the ring plate, wherein the first gap is in fluid communication
with the dry gas and an interior of the casing, wherein the first gap is in fluid communication with the second gap,
wherein, in a state where the coaxial connector is engaged with the mating coaxial connector of the probe card, the means
for mounting the interface body thereon at least a portion of the support column of the ring plate provides a means for preventing
the occurrence on condensation on at least a portion of the probe card.
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