| US 7,518,286 B2 | ||
| Vibration wave driven apparatus and vibrator | ||
| Nobuyuki Kojima, Machida (Japan); and Satoru Kitajima, Kawasaki (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, (Japan) | ||
| Appl. No. 10/576,812 PCT Filed Jun. 09, 2005, PCT No. PCT/JP2005/010989 § 371(c)(1), (2), (4) Date Apr. 24, 2006, PCT Pub. No. WO2005/122381, PCT Pub. Date Dec. 22, 2005. |
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| Claims priority of application No. 2004-171641 (JP), filed on Jun. 09, 2004. | ||
| Prior Publication US 2007/0069609 A1, Mar. 29, 2007 | ||
| Int. Cl. H01L 41/04 (2006.01); H01L 41/09 (2006.01) | ||
| U.S. Cl. 310—323.01 [310/328] | 15 Claims |
| 1. A vibration wave driven apparatus comprising:
a driven member; and
a vibrator comprising:
an elastic member having one surface opposed to said driven member, and another surface, said elastic member having a plurality
of spaced contact parts formed on the one surface and disposed in contact with said driven member, said elastic member being
formed of a single member; and
an electromechanical conversion element joined to the another surface of said elastic member,
wherein said elastic member has at least one cutout that extends completely through said elastic member to expose part of
said electromechanical conversion element at a location where the another surface of said elastic member is joined to said
electromechanical conversion element,
wherein portions of said elastic member adjacent to said cutout form the spaced contact parts,
wherein said at least one cutout is opposed to said driven member, and
wherein said elastic member is disposed in contact with said driven member only at said spaced contact parts.
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