US 7,517,635 B2
Polyester compound and resist material using the same
Satoru Miyazawa, Kawagoe (Japan); Satoru Kobayashi, Kawagoe (Japan); and Kazuhiko Maeda, Chiyoda-ku (Japan)
Assigned to Central Glass Company, Limited, Ube-shi (Japan)
Filed on Aug. 25, 2006, as Appl. No. 11/509,638.
Prior Publication US 2008/0050674 A1, Feb. 28, 2008
Int. Cl. G03C 1/73 (2006.01); G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/09 (2006.01); C08G 63/137 (2006.01)
U.S. Cl. 430—270.1  [430/908; 430/273.1; 528/272; 528/296; 528/302; 528/305] 11 Claims
 
1. A polymer compound represented by the general formula (1):

OG Complex Work Unit Drawing
where R1 and R2 are the same or different and each independently represent a hydrogen atom or a C1-C40 straight-chain, branched-chain or alicyclic hydrocarbon group or aromatic-ring containing hydrocarbon group that may optionally have a fluorine, oxygen, nitrogen, silicon, sulfur, hydroxyl, carboxyl, amino, amido, glycidyl, cyano, fluorocarbinol, sulfonic acid or silyl substituent; R3 represents a C1-C20 straight-chain, branched-chain or alicyclic hydrocarbon group or aromatic-ring containing divalent hydrocarbon group, some of which may optionally have a fluorine, oxygen, sulfur, silicon, carbonyl, hydroxyl, carboxyl, cyano, amino or fluoroalcohol substituent; R4 represents a single bond, methylene, ethylene or oxygen atom; and X represents a polymerization degree.