| US 7,514,947 B2 | ||
| Method of and system for functionally testing multiple devices in parallel in a burn-in-environment | ||
| Jason T. Albert, Rochester, Minn. (US); William T. Bronk, Shelburne, Vt. (US); Timothy J. Eby, Austin, Tex. (US); Michael J. Hamilton, Rochester, Minn. (US); and Norman K. James, Liberty Hill, Tex. (US) | ||
| Assigned to International Business Machines Corporation, Armonk, N.Y. (US) | ||
| Filed on Aug. 31, 2007, as Appl. No. 11/848,282. | ||
| Prior Publication US 2009/0058450 A1, Mar. 05, 2009 | ||
| Int. Cl. G01R 31/02 (2006.01); G01R 31/26 (2006.01) | ||
| U.S. Cl. 324—760 [324/765] | 19 Claims |
| 13. A semiconductor device testing system, which comprises:
a burn-in oven adapted to receive a plurality of devices;
a flexible service processor, said flexible service processor being configured to generate device test input signals and receive
device test output signals, said flexible service processor being further configured to generate test select signals and voltage
control signals;
a test multiplexer connected to receive device test signals from said flexible service processor and supply device test output
signals to said flexible service processor, said test multiplexer being configured to multiplex said device test signals to
selected devices in said burn-in oven under control of said test select signals at selected voltages under control of said
voltage control signals, said test multiplexer being further configured to receive device test output signals from said devices
and selectively provide device test output signals from selected devices under control of said test select signals.
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