| US 7,514,849 B2 | ||
| Two-dimensional moving apparatus | ||
| Atsushi Ichikawa, Ibaragi (Japan); and Masayasu Sato, Saitama (Japan) | ||
| Assigned to Hoya Corporation, Tokyo (Japan) | ||
| Filed on Jul. 25, 2006, as Appl. No. 11/459,682. | ||
| Claims priority of application No. P2005-215834 (JP), filed on Jul. 26, 2005; and application No. P2005-368600 (JP), filed on Dec. 21, 2005. | ||
| Prior Publication US 2007/0038316 A1, Feb. 15, 2007 | ||
| Int. Cl. H01L 41/00 (2006.01) | ||
| U.S. Cl. 310—328 [310/323.02] | 15 Claims |
| 1. A piezoelectric oscillator, comprising:
an exterior wall that moves a first urging member urging said exterior wall in a first direction, and moves a second urging
member urging said exterior wall in a second direction that is perpendicular to said first direction;
wherein said first urging member is moved in said second direction on the basis of vibration, and said second urging member
is moved in said first direction on the basis of said vibration.
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